Research infrastructure

TAU has excellent micro- and nanofabrication facilities available for research and industrial R&D work.

Local:

  • Tampere Microscopy Centre provides world-class imaging facilities of the nanoelectronic materials and components.
  • System-on-Chips Hub having 6×24-core server machines for ASIC development, simulation and physical design, and an FPGA environment for prototyping and development purposes with 30 high-end FPGA boards of which 10 are very large.
  • Cleanrooms: about 850m² (ISO 5 and ISO 7) for nanomaterial and semiconductor device processing.
  • Micro­ and nanofabrication infrastructure enables fabrication of samples and devices utilizing III­V semiconductors, silicon, metals, dielectrics, polymers and photonic glass. Three Molecular Beam Epitaxy (MBE) reactors for synthesis of GaAs, InP, and GaSb-based heterostructures. Further instruments for micro- and nanolithography, thin-film deposition, dry etching, wet processing, annealing, dicing and optical coatings. Interfacing options include methods like flip-chip bonding, wire bonding and uv-glue bonding and laser soldering.

National:

  • FinnLight, Finnish National Infrastructure for Light-Based Technologies, a TAU-coordinated consortium of photonics research infrastructures. FinnLight is co-funded by the Research Council of Finland as a national infrastructure. FinnLight is for all classes of photonics materials and process lines for device fabrication offers a wide range of services for the design, fabrication, characterization, and integration of photonics and light-based technologies.
  • National Research Infrastructure – Printed Intelligence Infrastructure, PII of the Laboratory for Future Electronics (thin-film fabrication of oxide semiconductors by atomic layer deposition (ALD, thermal and plasma) including device fabrication and characterization).